wet slot

We demonstrate low-loss slot waveguides on silicon-on-insulator platform. slot 12345 Waveguides oriented along the (11-2) direction on the Si (110) plane were first fabricated by a standard e-beam lithography and dry etching process A tetramethylammonium hydroxide-based anisotropic wet etching technique was then used to remove any residual side wall roughness Using this fabrication technique